技术参考

P水平轴 (X) 参数

行程长度                                                0.1 mm up to 130 mm / 260 mm

定位速度                                                0.02 mm/s up to 200 mm/s

测量速度                                                0.02 mm/s to 10 mm/s

粗糙度测量推荐: 0.1 mm/s to 0.5 mm/s

测量点间隔                                            0.05 µm up to 30 µm, 可调

点距                                                        £ 100 nm / 400 mm

一次测量的*大点数                            2.6 百万点 (MarSurf LD 130)

5.2 百万点 (MarSurf LD 260)

分辨率                                                    0.8 nm (0.03 µin)

X-axis 显示不确度                              ± (0,2+l/1000)µm; l in mm

系统噪音                                                < 5 nm RMS 表面粗糙度    < 5 nm

自动旋转驱动器                                    > ± 45°

测臂系统参数     (测量方向Z+ / Z-)

测针量程                                                13 mm (1 in) (100 mm 测臂)

26 mm (2 in) (200 mm 测臂)

分辨率                                                    0.8 nm (0.03 µin)

测力                                                        0.5 mN up to 30 mN (电控可调)

高精度转轴 (3D 版本)

径向误差                                                ± (0.01 + 0.00025H) µm; H 为始于台面的高度

轴向误差                                                ± (0.02 + 0.0001R) µm; R为始于轴心的半径

分辨率                                                    0.00025°

定位控制                                                < ± 0.02°

调心精度                                                < 0.8 µm

调平精度                                                < 0.006°

轮廓 – 显示误差

长度距离测量 EA                                MPEEA = ± (1.0+l/150)µm, l in  mm

半径测量 RK

R < 10 mm:                              MPER = ± 1.0 µm

10 mm < R < 300  mm:        MPER = ± (0.17+R/12)  µm R > 300 mm:                                         MPER = ± (-18+R/7) µm

形状误差                                                £ 100 nm

坡度                                                        < 90°

真实 3D 测量

测量时间                                                典型 5 到10 分钟

曲率半径                                                凹面极限 > 测头半径 (~10µm)

采点密度                                                典型: 线性2 µm, 圆周0.1° 3D: 圆周轨迹数量 + 插值

驱动器带有可自动找心的Y轴 所有回转对称的测量对象：

- 参考曲线 （可导入，例如 *.xyz）

- 非球面公式，包括奇数项系数dd confidents