ISO 14644-1 Cleanroom Standards
Class
|
Maximum
Particles/m³
|
FED
STD 209E equivalent
|
>0.1 um
|
>0.2 um
|
>0.3 um
|
>0.5 um
|
>1 um
|
>5 um
|
ISO 1
|
10
|
2
|
|
|
|
|
|
ISO 2
|
100
|
24
|
10
|
4
|
|
|
|
ISO 3
|
1,000
|
237
|
102
|
35
|
8
|
|
Class1
|
ISO 4
|
10,000
|
2,370
|
1,020
|
352
|
83
|
|
Class10
|
ISO 5
|
100,000
|
23,7000
|
102,000
|
3,5200
|
8,320
|
293
|
Class 100
|
ISO 6
|
1,000,000
|
237,000
|
102,000
|
35,200
|
8,320
|
2,930
|
Class1,000
|
ISO 7
|
|
|
|
352,000
|
83,200
|
2,930
|
Class 10,000
|
ISO 8
|
|
|
|
3,520,000
|
832,000
|
29,300
|
Class 100,000
|
ISO 9
|
|
|
|
35,200,000
|
8,320,000
|
293,000
|
Room Air
|