PCE-6V Mini plasma cleaner

Product Name

PCE-6v medium plasma cleaner

Main Features

1、Use gas as a cleaning medium avoids secondary pollution caused by the liquid cleaning medium.

2、It can thoroughly clean up organic Pollutions in a short time.

3、The cleaning can reach the molecular level.

4、The surface properties can be changed as needed under specific conditions.

5、Glow discharge during cleaning enhances adhesion, compatibility and wetting properties for the special-purpose materials and can be sterilized and sterilized.

6、The machine can optionally with heated sample stage and negative bias to achieve ion etching of the sample.

7、It is widely used in optics, optoelectronics, electronics, materials science, life sciences, polymer science, biomedicine, microfluidics and other fields.

Technical Parameters

1. Input voltage：AC 220V, 10A

2. Power:＜500W(include Vacuum Pump)

3. RF Power:RF power is 100W;

4. RF frequency:   13.56MHz

5. Plasma Chamber：Ø190mm×98mm

6. Quartz tube: Ø180mm × 55mm, wall thickness 7mm

7. Inner cavity: Ø165mm × 55mm

8. Cleaning electrode: Ø120mm

9. Sample stage: Ø150mm, effective size Ø140mm

10. Sample table and electrode spacing: 15mm-50mm adjustable

11. Exhaust pipe: Ø12mm

12. Ultimate vacuum: 0.1Pa

13. Working vacuum: 60Pa-500Pa

14. Number of airways: 2 (optional)

15. Number of flow controllers: 1, 2

16. Flow indicator: 2 channels

17. Air circuit interface: Ø6mm

18. Heating sample stage: Ø140mm, heating sample temperature RT-600°C±1°C (optional)

19. Cooling water pressure: 0.2KPa-0.4KPa

20. Working environment: temperature 5 °C-35 °C, humidity <80% (relative humidity) without condensation, altitude 0-2000m

Optional

1. Heating sample stage

2. Flow controller(Range 10, 50, 100, increase the number of channels ≤2)

Dimensions

245mm×235mm×460mm(Without Vacuum Pump)

Net Weight

 20kg ( 23Lbs)(Without Vacuum Pump)

Warranty

One year limited warranty with lifetime support ( no warranty for Pyrex glass chamber )

Application Note：

 Positive Pressure may damage Plasma Quartz Chamber.