VTC-300USS Ultrasonic Spin-Spray Coater (300-3000 rpm, 12" Wafer Max)

Produce Name

Ultrasonic Spin-Spray Coater VTC-300USS

Working voltage and Power

208V-240V, 50Hz/60Hz, 450W

Features

1. Combine the benefits of both spin and spray, enabling dense and uniform liquid-phase coating onto a large substrate

2. Applications include low-temperature precipitation (e.g., for RF/microwave ferrites deposition), polymer coating, powder and composite material coating, and coating on a patterned / uneven substrate

3. The system also works on spin alone and spray alone modes

Spin Coater

1. Vacuum chunk with adjustable substrate holders for holding flat substrate up to 12" diameter or 8" square

2. One oil-less pump for the vacuum chunk is included and controlled by the spin coater

3. For flat substrate diameter 8" the Spin speed: 300 - 5000 rpm adjustable

For flat substrate diameter 12" the Spin speed: 300 - 3000 rpm adjustable

4. For safety concerns, the speed is recommended to be limited to 2000 rpm for wafers larger than 8"

Ultrasonic Spray Nozzle

1. One ultrasonic generator with two ultrasonic sprays nozzles with compressed air shaper is included

2. Two spray nozzles with the KF-25 adapter are included.

One cylindrical type -- narrower spray ~20 mm diameter

One cone type -- wider spray ~40 mm diameter

3. Recommended compressed air pressure for aqueous solution: ~2 psi

4. One flow meter is integrated for regulating and monitoring the compressed air flow

5. Fluid viscosity range: 1 - 50 mPa·s (cP)

6. One swing arm for mounting ultrasonic spray head is built-in with adjustable speed and movement range

Injection system

We supply a variety of liquid systems（Single channel Syringe Pump, multiple channels Syringe Pump, Heatable Syringe Pump , etc.）

Heatable Syringe Pump

1. A heatable syringe pump with LCD touch screen control is included for delivering liquid to the ultrasonic nozzle

2. One 50 mL syringe is included for immediate use. The unit can accommodate syringe with 0.4 - 30 mm diameter

3. Pumping rate: 0.1 - 45 mm/min adjustable (0.08 mL/min - 35 mL/min for the included 50 mL syringe)

4. Flexible Polyimide heater with 30 segments programmable temperature controller is built-in for heating up to 75 °C

 Heat Lamp and Control

（Optional ）

Duo heat lamps (1000 W max power. Up to 80 ºC) with thermocouple and temperature controller can be ordered at extra cost for heating substrate by radiation (up to 65 ºC with 12" metal substrate)

Net Weight

160 lbs

Compliance

CE Certified

Warranty

One year limited with lifetime support

Rusting and damage due to improper storage condition or maintenance are not covered by warranty

Application Notes

（Optional 15“ Diameter with three ultrasonic spray heads is available upon request ）

1. It is the user’s responsibility to understand the risks associated with the process and use proper protections. Solvents and chemicals used for the process may be poisonous, oxidizing, or corrosive. Spinning a large / heavy substrate at high speeds runs the potential risk of substrate flying out and shattering. User is advised to wear protective clothing, mask, goggles, and gloves. The process must be confined in a fume hood (Order at the Optional section) with proper exhaust handling capability. Keep the fume hood sash (window door) lower than the spinner stage during experiments.

2. The film coating quality depends on the solution viscosity, substrate spin speed, substrate heating, and ultrasonic spray parameters, etc. User is advised to experiment the processing parameters for best results

3. Do not overflush the water bowl/base with any kinds of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the liquid residues in the bow/base. For more details about the cleaning procedures, please review the cleaning instruction for the spin coaters.