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- 产品名称:VTC-200P Anti-Corrosion Spin Coater ( 8000 RPM & 6" wafer Max.)
- 产品型号:VTC-200P
- 产品展商:Shenyang Kejing Auto-Instrument Co., LTD
- 产品文档:无相关文档
- 发布时间:2018-07-07
- 在线询价
简单介绍
VTC-200P Anti-Corrosion Spin Coater ( 8000 RPM & 6" wafer Max.) whose price including the vaccum pump price
VTC-200P Anti-Corrosion Spin Coater ( 8000 RPM & 6" wafer Max.) whose vaccum pump is the 70L container.
VTC-200P Anti-Corrosion Spin Coater ( 8000 RPM & 6" wafer Max.) which can be added one heat fuction
产品描述
Product introduction: VTC-200P is Anti-Corrosion Spin Coater made of Polypropylene (PP) material, which can be used for active acidic or alkali solution, especially suitable for use inside glovebox under Ar gas. 4'' dia. vacuum chuck is included for coating wafer upto 8". The digital control box is separated from spin coater which allows you operate in the remote location. The spinning speed is variable from 500-6000 rpm with six programmable segments. The package includes the oilless vacuum pump and 20ml syringe for immediate use. The machine is small in size and saves laboratory space. It is easy to operate and suitable for beginners.Therefore, the machine is widely used in the laboratories of universities, research institutes and enterprise units.
SPECIFICATIONS:
Product Name
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Anti-Corrosion Spin Coater VTC-200P
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Input Power
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1. Default 220VAC, 50Hz, single phase, 350W Max.
2. A power socket on the back of the Digital control box is used to supply power to the vacuum pump.
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Motor
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24VDC, Brushless,
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Structure
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1. Case and spin disk made of Polypropylene (PP) to resist most of the corrosive solutions.
2. Digital control box is separated from spin coater.
3. One filter is included in standard package. It is used to connect the pump and coater for preventing waste water from flowing into the pump.
4. One oil-less vacuum pump is included in the standard package.
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Chamber & Vacuum Chuck
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1. Chamber diameter: 210 mm
2. PP anti-corrosive vacuum chuck φ100mm, which can hold substrate upto 8" Dia.
3. The vacuum level for the Vacuum Chuck is -0.08MPa.
4. If your sample < 10 mm, please order rubber cup from us at extra cost .
5. By using the positioning tool can easily place the sample in the center of hte chuck.
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Programmable Control
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1. Digital control panel can store 12 programs and each program has 6 segments programmable for speeds, acceleration, and spin duration.
2. Maximum programmable spin time 6×60s = 360s .
3. 500 - 6000 RPM adjustable spinning speed at each segment
4. The safety interlock is integrated into the lid.
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Liquid Injecting
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20mL syringe is used to contain the coating material.
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Net Weight
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20 kg (45lbs)
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Compliance
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CE Certified
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Product Dimensions
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Spin Coater: 25.2cm(φ) x 41cm(H)
Digital controller: 23cm(L) x32cm(W) x16cm(H)
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Vacuum Pump
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One 120L/min Oilless Vacuum Pump is included in the standard package.
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Warranty
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1. One year limited with lifetime support
2. Rusting and damage due to improper storage condition or maintenance are not covered by warranty
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Application Notes
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Inorder to achieve better coating quality, please consider cleaning substrates by plasma cleaner before coating.
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Warnings
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1. Do not overflush the water bowl/base with any kinds of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the bow/base.
2. If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation.
3. For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters.
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Shipping Dimensions
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40"(L) x 30"(W) x 30"(H)
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Shipping Weight
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46 kg (100 lbs)
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