VTC-100PA Programmable Hi-Speed Spin Coater (10K r

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产品名称：VTC-100PA Programmable Hi-Speed Spin Coater (10K rpm & 5") with Vacuum Chuck
产品型号：VTC-100PA
产品展商：Shenyang Kejing Auto-Instrument Co., LTD
产品文档：无相关文档
发布时间：2017-08-17
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简单介绍

VTC-100PA Programmable Hi-Speed Spin Coater (10K rpm & 5") with Vacuum Chuck is suitable for surface coating process of semiconductor, crystal, CD etc. VTC-100PA Programmable Hi-Speed Spin Coater (10K rpm & 5") with Vacuum Chuck can be used for the coating of strong acid coating solution.

产品描述

Product introduction: VTC-100PA is CE certified tabletop spin coating device dedicated to spin coat small substrates up to 100 mm diameter at Max. 10000 rpm. The spin head actuator is a precision DC servo motor with accurate speed and acceleration control. The substrate can be held by vacuum (for thinner objects). The device has a user-friendly keyboard and LCD display for programming various parameters up to 12 programs, 6 segments. Spin duration, spin speed, and acceleration can be programmed from the front panel. All components in the device are corrosion protected to make it cleanroom compatible. The heatable cover is optional , which allow drying sample after coating.The machine is small in size and saves laboratory space. It is easy to operate and suitable for beginners.Therefore, the machine is widely used in the laboratories of universities, research institutes and enterprise units.

SPECIFICATIONS:

Product Name	Hi-Speed Spin Coater VTC-100PA
Input Power	1. AC 220V ,50Hz 2. 350 W total for the oilless pump and spin cater
Motor	24VDC high-speed motor
Main Features	1. 500 ~ 10000 RPM spinning speed programmable 2. Accept substrate from 5 mm to 5" 3. PP chamber for anti-corrosive operation. 4. One gas inlet port on top of the cover which can fill inert gas during coating 5. One 20ml Plastic Syringe is included 6. Suitable using Ar gas ( vacuum pump must be outside glovebox) 7. The safety interlock is integrated into the lid 8. The heatable cover is optional , which allow drying sample after coating.
Vacuum Chuck	1. Chamber size: 150 mm diameter 2. 2 sets of PP anti-corrosive vacuum chucks with different sizes (O-ring IDφ44mm, φ10mm), which can hold substrate from 5 mm to 5" Dia. ( see pic below ) 3. The vacuum level for the Vacuum Chuck is -0.08MPa. 4. By using the positioning tool can easily place the sample in the center of hte chuck.
Programmable Control	1. Digital control panel can store 12 programs and each program has 6 segments programmable for speeds, acceleration, and spin duration .( see pic below ) 2. Maximum programmable spin time 6×60s = 360s 3. 500 - 10000 RPM adjustable spinning speed at each segment 4. Acceleration: 100 - 2000 rpm / sec adjustable
Gas Inlet	6mm diameter gas inlet port allows customers to fill desired gas into the chamber, which can make coating under variable gas flow environment.
Vacuum Pump	1. One 120L/min Oilless Vacuum Pump is included in the standard package. 2. For Ar glove box user, Please consider our 24VDC vacuum pump to be used inside a glove box without feedthrough. 3. Vaccum grade rubber pipe is included for immediate use.
Product Dimensions	450mm Depth ×280mm W ×340mm H
Net Weight	20 kg
Application Notes	In order to achieve optimal coating quality, please consider cleaning substrates by a plasma cleaner prior to coating. This will significantly reduce the surface tension on the substrates.
Compliance	CE Certified
Warranty & Comp liance	1. One year limited with lifetime support 2. Rusting and damage due to improper storage condition or maintenance are not covered by warranty
Warnings	1. Do not overflush the water bowl/base with any kinds of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the bow/base. 2. If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation. 3. For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters.
Shipping Dimensions	40"(L) x 30"(W) x 30"(H)
Shipping Weight	46 kg (100 lbs)